MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

著者

• Urey, Hakan
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4985）

SPIE, c2003

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC08845302
• ISBN:
  • 0819447854
• LCCN: 2003271118
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xlii, 306 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621.36/7
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Imaging systems -- Congresses
  • LCSH : Scanning systems -- Congresses
  • LCSH : Optics, Adaptive -- Congresses
• 親書誌ID:
  • BA0022700X