MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

Author(s)

• Urey, Hakan
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4985）

SPIE, c2003

Note

Includes bibliographical references and index

• NCID: BC08845302
• ISBN:
  • 0819447854
• LCCN: 2003271118
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xlii, 306 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.36/7
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Imaging systems -- Congresses
  • LCSH : Scanning systems -- Congresses
  • LCSH : Optics, Adaptive -- Congresses
• Parent Bibliography ID:
  • BA0022700X