MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

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MOEMS display and imaging systems : 28-29 January 2003, San Jose, California, USA

Hakan Urey, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4985)

SPIE, c2003

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Includes bibliographical references and index

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