MOEMS display and imaging systems III : 24-25 January 2005, San Jose, California, USA

書誌事項

MOEMS display and imaging systems III : 24-25 January 2005, San Jose, California, USA

Hakan Urey, David L. Dickensheets, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5721)

SPIE, c2005

タイトル別名

MOEMS display and imaging systems 3

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注記

Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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