MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

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書誌事項

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4983）

SPIE, c2003

タイトル別名

Microelectromechanical systems and miniaturized systems III

MOEMS and miniaturized systems 3

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注記

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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