MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
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Bibliographic Information
MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4983)
SPIE, c2003
- Other Title
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Microelectromechanical systems and miniaturized systems III
MOEMS and miniaturized systems 3
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Includes bibliographical references and index