MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA
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Bibliographic Information
MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5346）
SPIE, c2004
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MOEMS and miniaturized systems 4
Microelectromechanical systems and miniaturized systems 4
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Includes bibliographical references and index
