MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

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書誌事項

MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5719）

SPIE, c2005

タイトル別名

MOEMS and miniaturized systems 5

MOEMS and miniaturized systems five

Microelectromechanical systems and miniaturized systems 5

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注記

Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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