MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

著者

• El-Fatatry, Ayman
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5719）

SPIE, c2005

タイトル別名

MOEMS and miniaturized systems 5

MOEMS and miniaturized systems five

Microelectromechanical systems and miniaturized systems 5

注記

Includes bibliographical references and author index

• NII書誌ID(NCID): BC08845459
• ISBN:
  • 0819456934
• LCCN: 2005298734
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xl, 190 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC22 : 621.36/7
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optics, Adaptive -- Congresses
  • LCSH : Optical scanners -- Congresses
• 親書誌ID:
  • BA0022700X