MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
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Bibliographic Information
MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6887）
SPIE, c2008
- pbk.
- Other Title
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MOEMS and miniaturized systems 7
Microelectromechanical systems and miniaturized systems 7
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Includes bibliographical references and author index
