High-k materials in multi-gate FET devices
著者
書誌事項
High-k materials in multi-gate FET devices
（Science, technology, and management series / series editor, J. Paulo Davim）
CRC Press, 2021
1st. ed
- : hbk
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
High-k Materials in Multi-Gate FET Devices focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies. It covers the various way of utilizing high-k dielectrics in multi-gate FETs for enhancing their performance at the device as well as circuit level.
Provides basic knowledge about FET devices
Presents the motivation behind multi-gate FETs, including current and future trends in transistor technologies
Discusses fabrication and characterization of high-k materials
Contains a comprehensive analysis of the impact of high-k dielectrics utilized in the gate-oxide and the gate-sidewall spacers on the GIDL of emerging multi-gate FET architectures
Offers detailed application of high-k materials for advanced FET devices
Considers future research directions
This book is of value to researchers in materials science, electronics engineering, semiconductor device modeling, IT, and related disciplines studying nanodevices such as FinFET and Tunnel FET and device-circuit codesign issues.
目次
Chapter 1 Introduction to Multi-Gate FET Devices
Chapter 2 High-k Gate Dielectrics and Metal Gate Stack Technology for
Advance Semiconductor Devices: An Overview
Chapter 3 Influence of High-k Material in Gate Engineering and in
Multi-Gate Field Effect Transistor Devices
Chapter 4 Trap Charges in High-k and Stacked Dielectric
Chapter 5 Impact of High-k Dielectric on the Gate-Induced Drain
Leakage of Multi-Gate FETs
Chapter 6 Advanced FET Design Using High-k Gate Dielectric and
Characterization for Low-Power VLSI
Chapter 7 Simulation and Analysis of Gate Stack DG MOSFET with
Application of High-k Dielectric Using Visual TCAD
Chapter 8 Novel Architecture in Gate All-Around (GAA) MOSFET
with High-k Dielectric for Biomolecule Detection
Chapter 9 Asymmetric Junctionless Transistor: A SRAM
Performance Study
Chapter 10 Performability Analysis of High-k Dielectric-Based
Advanced MOSFET in Lower Technology Nodes
Index
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