3D and circuit integration of MEMS

Author(s)

• 江刺, 正喜 エサシ, マサヨシ

Bibliographic Information

3D and circuit integration of MEMS

Edited by Masayoshi Esashi

Wiley-VCH, c2021

Note

Includes bibliographical references and index

Details

• NCID: BC09566916
• ISBN:
  • 9783527346479
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xii, 506 p.
• Size: 26 cm
• Classification:
  • DC23 : 621.38152
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Silicon-on-insulator technology
  • LCSH : Integrated circuits
  • LCSH : Metal oxide semiconductors, Complementary