18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany

Author(s)

• European Conference on Mask Technology for Integrated Circuits and Microcomponents
• Behringer, Uwe F. W.
• VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al. ; published by SPIE--The International Society for Optical Engineering]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4764）

SPIE, c2002

Other Title

Mask technology for integrated circuits and microcomponents

Note

Includes bibliographical references and index

Details

• NCID: BC0958132X
• ISBN:
  • 0819445312
• LCCN: 2003544603
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xiii, 256 p.
• Size: 28 cm
• Classification:
  • LCC : TK7872.M3
  • DC22 : 621.3815
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X