19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany

著者

• European Conference on Mask Technology for Integrated Circuits and Microcomponents
• Behringer, Uwe F. W.
• VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
• Semiconductor Equipment and Materials Institute. Europe
• Society of Photo-optical Instrumentation Engineers

書誌事項

19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al.] ; cooperating oganizations, SEMI Europe ... [et al.] ; published by SPIE--The International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5148）

SPIE, c2003

タイトル別名

Mask technology for integrated circuits and microcomponents

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC09581410
• ISBN:
  • 0819450189
• LCCN: 2004296385
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: li, 264 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
  • DC22 : 621.3815
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X