Graphene and VLSI interconnects

著者

書誌事項

Graphene and VLSI interconnects

Cher-Ming Tan, Udit Narula, Vivek Sangwan

Jenny Stanford Publishing, c2022

  • : hardcover

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects Provides the basic understanding of graphene-Cu interaction mechanism Introduces a novel graphene growth process and graphene-assisted electroless copper plating

目次

1. Introduction 2. Graphene Synthesis Methods 3. Novel and Improved Graphene Synthesis Method 4.Statistical Approach to Identify Key Growth Parameters of the Novel Graphene Growth PVD Processes 5. Copper-Graphene Interconnect

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