Graphene and VLSI interconnects
Author(s)
Bibliographic Information
Graphene and VLSI interconnects
Jenny Stanford Publishing, c2022
- : hardcover
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects
Provides the basic understanding of graphene-Cu interaction mechanism
Introduces a novel graphene growth process and graphene-assisted electroless copper plating
Table of Contents
1. Introduction 2. Graphene Synthesis Methods 3. Novel and Improved Graphene Synthesis Method 4.Statistical Approach to Identify Key Growth Parameters of the Novel Graphene Growth PVD Processes 5. Copper-Graphene Interconnect
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