Graphene and VLSI interconnects
著者
書誌事項
Graphene and VLSI interconnects
Jenny Stanford Publishing, c2022
- : hardcover
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects
Provides the basic understanding of graphene-Cu interaction mechanism
Introduces a novel graphene growth process and graphene-assisted electroless copper plating
目次
1. Introduction 2. Graphene Synthesis Methods 3. Novel and Improved Graphene Synthesis Method 4.Statistical Approach to Identify Key Growth Parameters of the Novel Graphene Growth PVD Processes 5. Copper-Graphene Interconnect
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