MEMS/NEMS technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China
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MEMS/NEMS technology and applications : 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 7159）
SPIE, c2009
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2008 International Conference on Optical Instruments and Technology
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Includes bibliographical references and index
