書誌事項

MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China

Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4928)

SPIE, c2002

タイトル別名

MOEMS technologies and applications

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注記

Includes bibliographic references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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