MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China
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MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4928)
SPIE, c2002
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MOEMS technologies and applications
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Includes bibliographic references and author index