MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China

著者

• Jin, Guofan
• McKillop, John S.
• Hane, Kazuhiro
• Society of Photo-optical Instrumentation Engineers
• Chinese Optical Society
• 上海交通大学 シャンハイ コウツウ ダイガク shang hai jiao tong da xue
• National Natural Science Foundation of China

書誌事項

MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China

Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4928）

SPIE, c2002

タイトル別名

MOEMS technologies and applications

注記

Includes bibliographic references and author index

詳細情報

• NII書誌ID(NCID): BC16158851
• ISBN:
  • 081944717X
• LCCN: 2003265092
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: ix, 302 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
• 親書誌ID:
  • BA0022700X