MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA

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書誌事項

MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA

Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4981）

SPIE, c2003

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MEMS components and applications for industry, automobiles, aerospace, and communication 2

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注記

Includes bibliographical references and index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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