MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA

Author(s)

• Henning, Albert Karl
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA

Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5717）

SPIE, c2005

Other Title

MEMS MOEMS components and their applications 2

Note

Includes bibliographical references and author index

Details

• NCID: BC16159435
• ISBN:
  • 0819456918
• LCCN: 2005279754
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xli, 242 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
• Parent Bibliography ID:
  • BA0022700X