MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA

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MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA

Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5717）

SPIE, c2005

タイトル別名

MEMS MOEMS components and their applications 2

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注記

Includes bibliographical references and author index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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