MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France

Author(s)

• Urey, Hakan
• SPIE Europe
• Alsace international
• Association française des industries de l'optique et de la photonique
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France

Hakan Urey, editor ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6993）

SPIE, c2008

Other Title

MEMS, MOEMS, and micromachining 3

Note

Includes bibliographical references and index

Details

• NCID: BC16159628
• ISBN:
  • 9780819471918
• LCCN: 2010287768
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Micromachining -- Congresses
• Parent Bibliography ID:
  • BA0022700X