Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA

Author(s)

• Ramesham, Rajeshuni
• Tanner, Danelle Mary
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA

Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4980）

SPIE, c2003

Other Title

Reliability, testing, and characterization of MEMS, MOEMS 2

Note

Includes bibliographical references and index

Details

• NCID: BC16161131
• ISBN:
  • 0819447803
• LCCN: 2003544707
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xliv, 334 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
  • LCSH : Microelectromechanical systems -- Testing -- Congresses
• Parent Bibliography ID:
  • BA0022700X