Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA

書誌事項

Reliability, testing, and characterization of MEMS/MOEMS II : 27-29 January 2003, San Jose, California, USA

Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4980)

SPIE, c2003

タイトル別名

Reliability, testing, and characterization of MEMS, MOEMS 2

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注記

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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