Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January, 2004, San Jose, California, USA

著者

• Tanner, Danelle Mary
• Ramesham, Rajeshuni
• Society of Photo-optical Instrumentation Engineers

書誌事項

Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January, 2004, San Jose, California, USA

Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5343）

SPIE, c2004

タイトル別名

Reliability, testing, and characterization of MEMS, MOEMS 3

注記

Includes bibliographical references and author index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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詳細情報

• NII書誌ID(NCID): BC16161222
• ISBN:
  • 0819452513
• LCCN: 2004301598
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xxxi, 312 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
  • LCSH : Microelectromechanical systems -- Testing -- Congresses
• 親書誌ID:
  • BA0022700X