Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

Author(s)

• Tanner, Danelle Mary
• Ramesham, Rajeshuni
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5716）

SPIE, c2005

Other Title

Reliability, testing and characterization of MEMS/MOEMS

Reliability, packaging, testing, and characterization of MEMS, MOEMS 4

Note

Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS

Includes bibliographical references and author index

Details

• NCID: BC16161299
• ISBN:
  • 081945690X
• LCCN: 2005299120
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xliii, 220 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
  • LCSH : Microelectromechanical systems -- Testing -- Congresses
• Parent Bibliography ID:
  • BA0022700X