Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

著者

• Tanner, Danelle Mary
• Ramesham, Rajeshuni
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5716）

SPIE, c2005

タイトル別名

Reliability, testing and characterization of MEMS/MOEMS

Reliability, packaging, testing, and characterization of MEMS, MOEMS 4

注記

Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC16161299
• ISBN:
  • 081945690X
• LCCN: 2005299120
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xliii, 220 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
  • LCSH : Microelectromechanical systems -- Testing -- Congresses
• 親書誌ID:
  • BA0022700X