Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

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書誌事項

Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA

Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5716）

SPIE, c2005

タイトル別名

Reliability, testing and characterization of MEMS/MOEMS

Reliability, packaging, testing, and characterization of MEMS, MOEMS 4

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注記

Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS

Includes bibliographical references and author index

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内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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