Reliability, packaging, testing, and characterization of MEMS/MOEMS V : 25-26 January, 2006, San Jose, California, USA

著者

書誌事項

Reliability, packaging, testing, and characterization of MEMS/MOEMS V : 25-26 January, 2006, San Jose, California, USA

Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6111）

SPIE, c2006

タイトル別名

Reliability, testing and characterization of MEMS/MOEMS

Reliability, packaging, testing, and characterization of MEMS, MOEMS 5

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注記

Some previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS

Includes bibliographical references and author index

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内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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