Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

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書誌事項

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4984）

SPIE, c2003

タイトル別名

Micromachining technology for micro-optics

Micromachining technology for microoptics and nanooptics

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注記

Earlier conference has title: Micromachining technology for micro-optics

Includes bibliographical references and index

内容説明・目次

内容説明

Earlier conference has title: Micromachining technology for micro-optics.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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