Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

Author(s)

• Johnson, Eric G.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4984）

SPIE, c2003

Other Title

Micromachining technology for micro-optics

Micromachining technology for microoptics and nanooptics

Note

Earlier conference has title: Micromachining technology for micro-optics

Includes bibliographical references and index

Details

• NCID: BC16169166
• ISBN:
  • 0819447846
• LCCN: 2003544711
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xlii, 262 p.
• Size: 28 cm
• Classification:
  • LCC : TA1660
  • DC22 : 621.36/93
• Subject Headings:
  • LCSH : Integrated optics -- Congresses
  • LCSH : Miniature electronic equipment -- Design and construction -- Congresses
  • LCSH : Optoelectronic devices -- Design and construction -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Nanotechnology -- Congresses
• Parent Bibliography ID:
  • BA0022700X