Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

著者

• Johnson, Eric G.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA

Eric G. Johnson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4984）

SPIE, c2003

タイトル別名

Micromachining technology for micro-optics

Micromachining technology for microoptics and nanooptics

注記

Earlier conference has title: Micromachining technology for micro-optics

Includes bibliographical references and index

内容説明・目次

内容説明

Earlier conference has title: Micromachining technology for micro-optics.

「Nielsen BookData」 より

• NII書誌ID(NCID): BC16169166
• ISBN:
  • 0819447846
• LCCN: 2003544711
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xlii, 262 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA1660
  • DC22 : 621.36/93
• 件名:
  • LCSH : Integrated optics -- Congresses
  • LCSH : Miniature electronic equipment -- Design and construction -- Congresses
  • LCSH : Optoelectronic devices -- Design and construction -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Nanotechnology -- Congresses
• 親書誌ID:
  • BA0022700X