Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

Author(s)

• Perez-Maher, Mary Ann
• Stewart, Harold D.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

Mary Ann Maher, Harold D. Stewart, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5715）

SPIE, c2005

Other Title

Micromachining and microfabrication process technology 10

Note

Includes bibliographical references and author index

Details

• NCID: BC16169279
• ISBN:
  • 0819456896
• LCCN: 2005299098
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 200 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC22 : 671.3/5
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X