Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

著者

• Perez-Maher, Mary Ann
• Stewart, Harold D.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA

Mary Ann Maher, Harold D. Stewart, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5715）

SPIE, c2005

タイトル別名

Micromachining and microfabrication process technology 10

注記

Includes bibliographical references and author index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BC16169279
• ISBN:
  • 0819456896
• LCCN: 2005299098
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vii, 200 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC22 : 671.3/5
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X