Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA

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書誌事項

Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA

Kenneth W. Tobin, Jr., Iraj Emami, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5041）

SPIE, c2003

タイトル別名

Design, process integration, and characterization for microelectronics

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注記

Includes bibliographical references and index

Earlier conference called: Design, process integration, and characterization for microelectronics

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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