Micro- and nanoelectronics 2003 : 6-10 October 2003, Zvenigorod, Russia

Author(s)

• ICMNE
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Russian Academy of Sciences. Institute of Physics and Technology
• Russia (Federation). Ministry of Industry, Science, and Technologies

Bibliographic Information

Micro- and nanoelectronics 2003 : 6-10 October 2003, Zvenigorod, Russia

Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences [and] SPIE Russia Chapter ; sponsored by Ministry of Industry, Science, and Technologies of Russian Federation ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5401）

SPIE, c2004

Other Title

ICMNE-2003

ICMNE 2003

Microelectronics and nanoelectronics 2003

Note

"Selected papers ... ICMNE-2003"--P. xvii

Includes bibliographical references and index

Details

• NCID: BC16170824
• ISBN:
  • 0819453242
• LCCN: 2005278294
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xvii, 762 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Materials -- Congresses
• Parent Bibliography ID:
  • BA0022700X