Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

著者

• ICMNE
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Institute of Physics and Technology (Russia)
• Russia (Federation). Ministry of Education and Science

書誌事項

Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology (Russia) [and] SPIE Russia Chapter ; sponsored by Ministry of Education and Science of the Russian Federation (Russia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6260）

SPIE, c2006

タイトル別名

ICMNE-2005

ICMNE 2005

Microelectronics and nanoelectronics

注記

"This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--P. xv

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC16171077
• ISBN:
  • 0819463256
• LCCN: 2006285630
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Materials -- Congresses
• 親書誌ID:
  • BA0022700X