Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

Author(s)

• ICMNE
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Institute of Physics and Technology (Russia)
• Russia (Federation). Ministry of Education and Science

Bibliographic Information

Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology (Russia) [and] SPIE Russia Chapter ; sponsored by Ministry of Education and Science of the Russian Federation (Russia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6260）

SPIE, c2006

Other Title

ICMNE-2005

ICMNE 2005

Microelectronics and nanoelectronics

Note

"This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--P. xv

Includes bibliographical references and author index

Details

• NCID: BC16171077
• ISBN:
  • 0819463256
• LCCN: 2006285630
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Materials -- Congresses
• Parent Bibliography ID:
  • BA0022700X