Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

著者

• ICMNE
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Institute of Physics and Technology (Russia)
• Russia (Federation). Ministry of Education and Science

書誌事項

Micro- and nanoelectronics 2005 : 3-7 October 2005, Zvenigorod, Russia

Kamil A. Valiev, Alexander A. Orlikovsky, chairs/editors ; organized by FTIAN--Institute of Physics and Technology (Russia) [and] SPIE Russia Chapter ; sponsored by Ministry of Education and Science of the Russian Federation (Russia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6260）

SPIE, c2006

タイトル別名

ICMNE-2005

ICMNE 2005

Microelectronics and nanoelectronics

注記

"This proceedings volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2005 (ICMNE-2005)"--P. xv

Includes bibliographical references and author index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BC16171077
• ISBN:
  • 0819463256
• LCCN: 2006285630
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Materials -- Congresses
• 親書誌ID:
  • BA0022700X