Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia

Author(s)

• ICMNE -- International Conference on Micro- and Nanoelectronics
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Russian Academy of Sciences. Institute of Physics and Technology
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Russian Foundation for Basic Research
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia

Kamil A. Vaiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russia), SPIE Russia Chapter ; sponsored by Russian Foundation for Basic Research (Russia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 7025）

SPIE, c2008

Other Title

ICMNE-2007

ICMNE 2007

Microelectronics and nanoelectronics

International Conference on Micro- and Nanoelectronics 2007

Note

"This volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007), held in Zvenigirod, Moscow region, 1-5 October 2007 "--P. xv

Includes bibliographical references and index

Details

• NCID: BC16171237
• ISBN:
  • 9780819472380
• LCCN: 2010483565
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.81
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Congresses
• Parent Bibliography ID:
  • BA0022700X