Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia

著者

• ICMNE -- International Conference on Micro- and Nanoelectronics
• Valiev, K. A. (Kamilʹ Akhmetovich)
• Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
• Russian Academy of Sciences. Institute of Physics and Technology
• Society of Photo-optical Instrumentation Engineers. Russian Chapter
• Russian Foundation for Basic Research
• Society of Photo-optical Instrumentation Engineers

書誌事項

Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia

Kamil A. Vaiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russia), SPIE Russia Chapter ; sponsored by Russian Foundation for Basic Research (Russia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 7025）

SPIE, c2008

タイトル別名

ICMNE-2007

ICMNE 2007

Microelectronics and nanoelectronics

International Conference on Micro- and Nanoelectronics 2007

注記

"This volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007), held in Zvenigirod, Moscow region, 1-5 October 2007 "--P. xv

Includes bibliographical references and index

• NII書誌ID(NCID): BC16171237
• ISBN:
  • 9780819472380
• LCCN: 2010483565
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC22 : 621.81
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Lithography -- Congresses
  • LCSH : Photonics -- Congresses
• 親書誌ID:
  • BA0022700X