Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia
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書誌事項
Micro- and nanotechnology : materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5650)
SPIE, c2005
- タイトル別名
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Microtechnology and nanotechnology 2
Materials, processes, packaging, and systems 2
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注記
"Part of SPIE's 2004 International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, held at University of New South Wales, Sydney, Australia, on 12-15 December 2004"--P. xiii
Includes bibliographical references and author index
