Scanning electron microscopy : physics of image formation and microanalysis
Author(s)
Bibliographic Information
Scanning electron microscopy : physics of image formation and microanalysis
（Springer series in optical sciences, v. 45）
Springer, c1998
2nd completely rev. and updated ed
- : pbk
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Note
"With 260 figures"
"Softcover reprint of the hardcover 2nd edition 1998"--t.p. verso
References: p. [449]-514
Index: p. [515]-527
Description and Table of Contents
Description
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Table of Contents
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.
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