Understanding surface and thin film science
著者
書誌事項
Understanding surface and thin film science
CRC Press, 2023
- : hbk
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Provides a practical, experimentally-driven introduction to the materials science of surfaces and thin films
Connects the essential concepts with the variables controlled in a laboratory setting, to aid in understanding experimental design and results
Takes a visual approach with many illustrations of experimental deposition and characterization techniques to highlight what happens at the atomic level on surfaces and thin films
Includes worked examples and problems at the end of each chapter
Gives conceptually clear, mathematically simple explanations
目次
1. Surfaces and Thin Films 2. Vacuum and Plasma Environments Part 1: Surfaces 3. Crystal Structure 4. Atomic Motion: Vibrations, Waves and Diffusion in Solids 5. Thermodynamics 6. Electrical, Magnetic, Optical, and Thermal Properties 7. Adsorbed Atoms on Surfaces Part 2: Thin Films 8. Overview of Thin Film Growth 9. Physical Vapor Deposition 10. Chemical Vapor Deposition Part 3: Characterization of Surfaces and Thin Films 11. Characterization: Overview and Imaging Techniques 12. Characterization: Structural Techniques 13. Characterization: Chemical and Elemental Techniques 14. Characterization: Electrical, Magnetic, and Optical Techniques 15. Characterization: Thermodynamic, Thermal, and Mechanical Techniques
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