Optical lithography : here is why

Author(s)

• Lin, Burn Jeng

Bibliographic Information

Optical lithography : here is why

Burn J. Lin

SPIE Press, c2021

2nd ed

Note

Includes bibliographical references and index

• NCID: BD01149424
• ISBN:
  • 9781510639959
• LCCN: 2020049078
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington U.S.
• Pages/Volumes: xvii, 560 p.
• Size: 26 cm
• Classification:
  • DC23 : 621.381531
  • LCC : TK7872.M3
  • DC22 : 621.3815/31
• Subject Headings:
  • LCSH : Microlithography
  • LCSH : Semiconductors -- Etching
  • LCSH : Lasers -- Industrial applications