EUV lithography

Author(s)

• Bakshi, Vivek

Bibliographic Information

EUV lithography

Vivek Bakshi, Editor

SPIE Press, c2018

2nd ed

Note

Includes bibliographical references and index

Details

• NCID: BD05689332
• ISBN:
  • 9781510616783
• LCCN: 2017051759
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: xxxii, 726 p.
• Size: 27cm
• Classification:
  • LCC : QC459
  • DC : 621.3815
• Subject Headings:
  • LCSH : Ultraviolet radiation -- Industrial applications
  • LCSH : Photolithography
  • LCSH : Optical coatings