Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994
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Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994
VDE-Verlag, c1994
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Includes bibliographical references and author's index