Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994

Author(s)

Bibliographic Information

Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994

Herbert Reichl, Anton Heuberger, editors

VDE-Verlag, c1994

Available at  / 1 libraries

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Note

Includes bibliographical references and author's index

Details

  • NCID
    BD0707566X
  • ISBN
    • 3800720582
  • Country Code
    gw
  • Title Language Code
    ger
  • Text Language Code
    ger
  • Place of Publication
    Berlin
  • Pages/Volumes
    1212 p.
  • Size
    25 cm
  • Classification
    • SG86 : 37
    • SG86 : 28
  • Subject Headings
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