{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BD0707566X.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BD0707566X#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BD0707566X.json"},"dc:title":[{"@value":"Micro system technologies '94 : 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994"}],"dc:creator":"Herbert Reichl, Anton Heuberger, editors","dc:publisher":[{"@value":"VDE-Verlag"}],"dcterms:extent":"1212 p.","cinii:size":"25 cm","dc:language":"ger","dc:date":"1994","cinii:ncid":"BD0707566X","cinii:ownerCount":"1","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA05314673#entity","@type":"foaf:Person","foaf:name":[{"@value":"International Conference on Micro Electro, Opto, Mechanic Systems and Components"}]},{"@id":"https://ci.nii.ac.jp/author/DA0501602X#entity","@type":"foaf:Person","foaf:name":[{"@value":"Reichl, H. (Herbert)"}]},{"@id":"https://ci.nii.ac.jp/author/DA0396264X#entity","@type":"foaf:Person","foaf:name":[{"@value":"Heuberger, A."}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA011791","@type":"foaf:Organization","foaf:name":"東京大学 工学部・工学系研究科","rdfs:seeAlso":{"@id":"https://opac.dl.itc.u-tokyo.ac.jp/opac/opac_openurl/?ncid=BD0707566X"}}],"prism:publicationDate":["c1994"],"cinii:note":["Includes bibliographical references and author's index"],"dc:subject":["SG86:37","SG86:28"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Mikrosystemtechnik+--+Kongress+--+Berlin+%3C1994%3E","dc:title":"Mikrosystemtechnik -- Kongress -- Berlin <1994>"}],"dcterms:hasPart":[{"@id":"urn:isbn:3800720582"}]}]}