Micro system technologies 96 : 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996

Author(s)

• International Conference on Micro, Electro, Opto, Mechanic Systems and Components
• Reichl, H. (Herbert)
• Heuberger, A.

Bibliographic Information

Micro system technologies 96 : 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996

Herbert Reichl, Anton Heuberger, editors

VDE-Verlag, c1996

Note

Includes bibliographical references and author's index

Details

• NCID: BD07075750
• ISBN:
  • 3800722003
• LCCN: 97151761
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: 868 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Electronic circuit design -- Data processing -- Congresses
  • LCSH : Electronic packaging -- Congresses
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : High technology -- Congresses