Micro system technologies 96 : 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996

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Micro system technologies 96 : 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996

Herbert Reichl, Anton Heuberger, editors

VDE-Verlag, c1996

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Includes bibliographical references and author's index

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