Chemical vapor deposition polymerization : the growth and properties of parylene thin films

著者

• Fortin, Jeffrey B.
• Lu, T.-M. (Toh-Ming)

書誌事項

Chemical vapor deposition polymerization : the growth and properties of parylene thin films

by Jeffrey B. Fortin, Toh-Ming Lu

Kluwer Academic Publishers, c2004

• : softcover

注記

"Softcover reprint of the hardcover 1st edition 2004"--T.p. verso

Includes bibliographical references (p. [91]-99) and index

詳細情報

• NII書誌ID(NCID): BD08389095
• ISBN:
  • 9781441954138
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boston
• ページ数/冊数: xvi, 102 p.
• 大きさ: 24 cm
• 分類:
  • DC22 : 671.735
• 件名:
  • LCSH : Chemical vapor deposition
  • LCSH : Thin films
  • LCSH : Polymerization