Principles of plasma discharges and materials processing

書誌事項

Principles of plasma discharges and materials processing

Michael A. Lieberman, Allan J. Lichtenberg

John Wiley, [2025]

3rd edition

  • : hardback

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注記

Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)

Includes bibliographical references (pages 727-747) and index

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