Principles of plasma discharges and materials processing

Author(s)

• Lieberman, M. A. (Michael A.)
• Lichtenberg, Allan J.

Bibliographic Information

Principles of plasma discharges and materials processing

Michael A. Lieberman, Allan J. Lichtenberg

John Wiley, [2025]

3rd edition

• : hardback

Note

Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)

Includes bibliographical references (pages 727-747) and index

Details

• NCID: BD09481887
• ISBN:
  • 9781394245376
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Hoboken, New Jersey
• Pages/Volumes: lxiii, 759 pages
• Size: 27 cm
• Classification:
  • LCC : QC718.5.D9
  • DC22 : 530.4/4
• Subject Headings:
  • LCSH : Plasma dynamics
  • LCSH : Thin films -- Surfaces
  • LCSH : Plasma etching
  • LCSH : Plasma chemistry -- Industrial applications