Nanolithography and surface microscopy with electron beams
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Bibliographic Information
Nanolithography and surface microscopy with electron beams
(Advances in imaging and electron physics, volume 231)
Academic Press, an imprint of Elsevier, [2024] , , c2024
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Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)
Includes bibliographical references and index